Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Calder Sheagren Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Calder Sheagren returned 2 record(s).

NumberTitle
1Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
2Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators