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Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN

Type:
Journal
Info:
Applied Physics Letters 115, 241101 (2019)
Date:
2019-11-26
DOI:
http://dx.doi.org/10.1063/1.5131664

Author Information

Name Institution
Risheng ChengYale University
Sihao WangYale University
Hong X. TangYale University

Films

Plasma NbN

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TBTDEN, Tris(diethylamido)(tert-butylimido)niobium
CAS#: 210363-27-2
N2, Nitrogen
CAS#: 7727-37-9
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 300C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: -

Characteristic: Resistivity, Sheet Resistance
Analysis: van der Pauw sheet resistance
Diagnostic: -

Characteristic: Superconductivity
Analysis: -
Diagnostic: Quantum Design PPMS

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: -

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: -

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: -

Characteristic: Compositional Depth Profiling
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: -

Characteristic: Photoresponse
Analysis: SNSPDs, Superconducting nanowire single-photon detectors
Diagnostic: Custom

Substrates

Si3N4

Notes

1545