Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
Type:
Journal
Info:
IEEE Transactions on Applied Superconductivity (Volume: 27, Issue: 4, June 2017)
Date:
2017-01-19
Author Information
| Name | Institution |
|---|---|
| M. Ukibe | National Institute of Advanced Industrial Science and Technology |
| G. Fujii | National Institute of Advanced Industrial Science and Technology |
Films
Plasma NbN
Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
CAS#: 210363-27-2
CAS#: 7727-37-9
CAS#: 1333-74-0
Film/Plasma Properties
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Superconductivity
Analysis: -
Substrates
| Sapphire |
Notes
| 1026 |