Mario Ziegler Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mario Ziegler returned 8 record(s).

Number	Title
1	Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
2	Background-Free Bottom-Up Plasmonic Arrays with Increased Sensitivity, Specificity and Shelf Life for SERS Detection Schemes
3	Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
4	3D structure evolution using metastable atomic layer deposition based on planar silver templates
5	Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
6	Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma
7	Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
8	Electrically Excited Plasmonic Nanoruler for Biomolecule Detection