Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Emanuel Knehr Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Emanuel Knehr returned 2 record(s).

NumberTitle
1Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
2Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices