Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Lauri Kilpi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Lauri Kilpi returned 2 record(s).

NumberTitle
1Tribological properties of thin films made by atomic layer deposition sliding against silicon
2Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors