Alexander Pyymaki Perros Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander Pyymaki Perros returned 8 record(s).

Number	Title
1	Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF₆ based plasmas
2	Surface passivation of GaAs nanowires by the atomic layer deposition of AlN
3	Protective capping and surface passivation of III-V nanowires by atomic layer deposition
4	High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
5	Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
6	Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al₂O₃ for Photoluminescence Enhancement
7	Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
8	Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition