The important role of water in growth of monolayer transition metal dichalcogenides

Type:
Journal
Info:
2D Materials 4 (2017) 021024
Date:
2017-02-08

Author Information

Name Institution
Christoph KastlLawrence Berkeley National Laboratory
Christopher T ChenLawrence Berkeley National Laboratory
Tevye R KuykendallLawrence Berkeley National Laboratory
Brian ShevitskiLawrence Berkeley National Laboratory
Thomas P DarlingtonLawrence Berkeley National Laboratory
Nicholas J BorysLawrence Berkeley National Laboratory
Andrey KrayevAIST-NT
P James SchuckLawrence Berkeley National Laboratory
Shaul AloniLawrence Berkeley National Laboratory
Adam M. SchwartzbergLawrence Berkeley National Laboratory

Films

Plasma WO3


Plasma MoOx


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Substrates

SiO2

Notes

1036