LiCoO2 Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications discussing LiCoO2 films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
|Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries