Publication Information

Title:
Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
Type:
Journal
Info:
Journal of The Electrochemical Society, 160 (5) A3066-A3071 (2013)
Date:
2013-02-21

Author Information

Name Institution
Merijn E. DondersMaterials innovation institute M2i
W. M. ArnoldbikEindhoven University of Technology
Harm C. M. KnoopsEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology
Peter H. L. NottenEindhoven University of Technology

Films


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Microstructure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction

Characteristic: Raman Spectra
Analysis: Raman Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry

Characteristic: Chemical Composition, Impurities
Analysis: EBS, Elastic Backscattering

Characteristic: Battery Properties
Analysis: Galvanostatic Cycling

Characteristic: Chemical Composition, Impurities
Analysis: NRA, Nuclear Reaction Analysis

Substrates

Si(100)
SiO2
Pt

Keywords

Lithium-ion
Batteries

Notes

593