Publication Information

Title: Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries

Type: Journal

Info: Journal of The Electrochemical Society, 160 (5) A3066-A3071 (2013)

Date: 2013-02-21

DOI: http://dx.doi.org/10.1149/2.011305jes

Author Information

Name

Institution

Materials innovation institute M2i

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Films

Plasma LiCoO2 using Custom

Deposition Temperature = 325C

1907-33-1

1277-43-6

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam M-2000U

Refractive Index

Ellipsometry

J.A. Woollam M-2000U

Microstructure

GIXRD, Grazing Incidence X-Ray Diffraction

PANalytical Xpert PRO MPD X-ray Diffractometer

Raman Spectra

Raman Spectroscopy

Renishaw Invia Raman

Chemical Composition, Impurities

RBS, Rutherford Backscattering Spectrometry

Unknown

Chemical Composition, Impurities

EBS, Elastic Backscattering

Unknown

Battery Properties

Galvanostatic Cycling

Maccor M2300 galvanostat

Chemical Composition, Impurities

NRA, Nuclear Reaction Analysis

Maccor M2300 galvanostat

Substrates

Si(100)

SiO2

Pt

Keywords

Lithium-ion

Batteries

Notes

593



Shortcuts



© 2014-2018 plasma-ald.com