W. M. Arnoldbik Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by W. M. Arnoldbik returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries