Custom Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
2A controlled growth of WNx and WCx thin films prepared by atomic layer deposition
3A Silicon Nitride MIM Capacitor for Analog/Mixed-Signal Integrated Circuit using Manufacturable Atomic Layer Deposition Equipment
4Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
5Al2O3 multi-density layer structure as a moisture permeation barrier deposited by radio frequency remote plasma atomic layer deposition
6Alloyed 2D Metal-Semiconductor Atomic Layer Junctions
7Atmospheric pressure plasma enhanced spatial ALD of silver
8Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
9Atomic layer deposition growth of a novel mixed-phase barrier for seedless copper electroplating applications
10Atomic layer deposition of copper thin film and feasibility of deposition on inner walls of waveguides
11Atomic Layer Deposition of HfO2 Thin Films on Ultrathin SiO2 Formed by Remote Plasma Oxidation
12Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
13Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
14Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
15Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
16Atomic layer deposition of titanium nitride from TDMAT precursor
17Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
18Atomic Layer Epitaxy of Group IV Materials: Surface Processes, Thin Films, Devices and Their Characterization
19Atomic layer epitaxy of Si on Ge(100) using Si2Cl6 and atomic hydrogen
20Barrier Characteristics of TaN Films Deposited by Using the Remote Plasma Enhanced Atomic Layer Deposition Method
21Barrier Characteristics of ZrN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(diethylamino)zirconium Precursor
22Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
23Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
24Characteristics of AlxTi1-xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition
25Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
26Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer
27Characteristics of Cobalt Films Deposited by Using a Remote Plasma ALD Method with a CpCo(CO)2 Precursor
28Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition
29Characteristics of NiO films prepared by atomic layer deposition using bis(ethylcyclopentadienyl)-Ni and O2 plasma
30Characteristics of Plasma-Enhanced Atomic-Layer Deposited (PEALD) SnO2 Thin Films
31Characteristics of the HfO2 Thin Films Grown by Remote Plasma Atomic Layer Deposition Method on the Plasma Oxidized Si Substrate
32Characteristics of Ti-Capped Co Films Deposited by a Remote Plasma ALD Method Using Cyclopentadienylcobalt Dicarbonyl
33Characteristics of TiN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Method
34Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten
35Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
36Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O
37Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
38Comparison of Co Films Deposited by Remote Plasma Atomic Layer Deposition Method with Cyclopentadienylcobalt Dicarbonyl [CpCo(CO)2] and Dicobalt Octacarbonyl [Co2(CO)8]
39Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
40Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
41Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
42Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
43Controlling the composition of Ti1-xAlxN thin films by modifying the number of TiN and AlN subcycles in atomic layer deposition
44Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
45Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process
46Designing high performance precursors for atomic layer deposition of silicon oxide
47Effect of Nitrogen Incorporation in HfO2 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
48Effect of Sr-Ruthenate Seed Layer on Dielectric Properties of SrTiO3 Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
49Effect of Surface Reduction Treatments of Plasma-Enhanced Atomic Layer Chemical Vapor Deposited TaNx on Adhesion with Copper
50Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
51Effects of Fluorine Plasma Treatment on the Electronic Structure of Plasma-Enhanced Atomic Layer Deposition HfO2
52Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
53Electrical Properties of Alumina Films by Plasma-Enhanced Atomic Layer Deposition
54Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
55Electrical properties of SrTa2O6 thin films by plasma enhanced atomic layer deposition (PEALD)
56Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100°C Using Sequential Surface Reactions
57Encapsulation method for atom probe tomography analysis of nanoparticles
58Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure
59Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification
60Fabrication and Characterization of Flexible Thin Film Transistors on Thin Solution-Cast Substrates
61Fabrication and Properties of GaN MIS Capacitors with a Remote-Plasma Atomic-Layer-Deposited Al2O3 Gate Dielectric
62Fast PEALD ZnO Thin-Film Transistor Circuits
63Fixed-Gap Tunnel Junction for Reading DNA Nucleotides
64Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
65From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
66Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
67Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations
68Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon
69Growth characteristics and electrical properties of La2O3 gate oxides grown by thermal and plasma-enhanced atomic layer deposition
70Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition
71Growth of rutile-TiO2 thin films via Sn doping and insertion of ultra-thin SnO2 interlayer by atomic layer deposition
72High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films
73High-Quality Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition
74Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl4/NH3 System
75Improved Oxygen Diffusion Barrier Properties of Ruthenium-Titanium Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
76Improvement of Gas-Sensing Performance of Large-Area Tungsten Disulfide Nanosheets by Surface Functionalization
77Improvement of the thermal stability of nickel silicide using a ruthenium interlayer deposited via remote plasma atomic layer deposition
78Improvements on Interface Reliability and Capacitance Dispersion of Fluorinated ALD-Al2O3 Gate Dielectrics by CF4 Plasma Treatment
79In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
80In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating
81Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
82Influence of Surface Temperature on the Mechanism of Atomic Layer Deposition of Aluminum Oxide Using an Oxygen Plasma and Ozone
83Infrared Study of Room Temperature Atomic Layer Deposition of SnO2 Using Sn(CH3)4 and Plasma Excited Humidified Argon
84Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
85Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
86Initiation of atomic layer deposition of metal oxides on polymer substrates by water plasma pretreatment
87Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications
88Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition
89Localized defect states and charge trapping in atomic layer deposited-Al2O3 films
90Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
91Low temperature hydrogen plasma-assisted atomic layer deposition of copper studied using in situ infrared reflection absorption spectroscopy
92Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
93Low-Power Double-Gate ZnO TFT Active Rectifier
94Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
95Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma
96Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells
97Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
98Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma
99Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
100Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
101Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
102Microstructure analysis of plasma enhanced atomic layer deposition-grown mixed-phase RuTaN barrier for seedless copper electrodeposition
103Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
104Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system
105Moisture Barrier Properties of Al2O3 Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures
106Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
107Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co
108Nucleation and growth characteristics of electroplated Cu on plasma enhanced atomic layer deposition-grown RuTaN direct plate barriers
109Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
110Nucleation and growth of tantalum nitride atomic layer deposition on Al2O3 using TBTDET and hydrogen radicals
111Optical and Electrical Properties of AlxTi1-xO Films
112Optical and Electrical Properties of TixSi1-xOy Films
113Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
114Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition
115Oxide Charge Engineering of Atomic Layer Deposited AlOxNy/Al2O3 Gate Dielectrics: A Path to Enhancement Mode GaN Devices
116Oxide semiconductor thin film transistors on thin solution-cast flexible substrates
117Oxide TFT LC Oscillators on Glass and Plastic for Wireless Functions in Large-Area Flexible Electronic Systems
118Patterned deposition by plasma enhanced spatial atomic layer deposition
119PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
120PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads
121Permeation barrier properties of an Al2O3/ZrO2 multilayer deposited by remote plasma atomic layer deposition
122Plasma Enhanced Atomic Layer Deposition of Al2O3 and TiN
123Plasma enhanced atomic layer deposition of Fe2O3 thin films
124Plasma enhanced atomic layer deposition of Ga2O3 thin films
125Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
126Plasma enhanced atomic layer deposition of magnesium oxide as a passivation layer for enhanced photoluminescence of ZnO nanowires
127Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System
128Plasma enhanced atomic layer deposition of SrTiO3 thin films with Sr(tmhd)2 and Ti(i-OPr)4
129Plasma Enhanced Atomic Layer Deposition of TiCxNy Film with Various Reactive Gases
130Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets
131Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
132Plasma-Enhanced ALD of Titanium-Silicon-Nitride Using TiCl4 , SiH4, and N2/H2/Ar Plasma
133Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating
134Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
135Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
136Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
137Plasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers
138Plasma-Enhanced Atomic Layer Deposition of Ta-N Thin Films
139Plasma-Enhanced Atomic Layer Deposition of TaCxNy Films with tert-Butylimido Tris-diethylamido Tantalum and Methane-Hydrogen Gas
140Preparation of Ru thin film layer on Si and TaN/Si as diffusion barrier by plasma enhanced atomic layer deposition
141Pt Nanocrystals Embedded in Remote Plasma Atomic-Layer-Deposited HfO2 for Nonvolatile Memory Devices
142Pulse plasma assisted atomic layer deposition of W–C–N thin films for Cu interconnects
143Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
144Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition
145Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
146Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride
147Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
148Remote Plasma ALD of Platinum and Platinum Oxide Films
149Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
150Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
151Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor
152Resistive switching properties of plasma enhanced-ALD La2O3 for novel nonvolatile memory application
153Role of the (Ta/Nb)Ox/Al2O3 interface on the flatband voltage shift for Al2O3/(Ta/Nb)Ox/Al2O3 multilayer charge trap capacitors
154Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
155Room temperature atomic layer deposition of TiO2 on gold nanoparticles
156Room-Temperature Atomic Layer Deposition of HfO2 By Using Remote Plasma Source
157Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
158RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor
159RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor
160Ru thin film grown on TaN by plasma enhanced atomic layer deposition
161Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
162Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
163Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition
164Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
165Study on the characteristics of aluminum thin films prepared by atomic layer deposition
166Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
167Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
168Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
169Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
170Ta-rich atomic layer deposition TaN adhesion layer for Cu interconnects by means of plasma-enhanced atomic layer deposition
171The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
172The size effect of titania-supported Pt nanoparticles on the electrocatalytic activity towards methanol oxidation reaction primarily via the bifunctional mechanism
173Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
174Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
175Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
176Toward plasma enhanced atomic layer deposition of oxides on graphene: Understanding plasma effects
177Ultra-thin Al2O3 coating on the acid-treated 0.3Li2MnO3·0.7LiMn0.60Ni0.25Co0.15O2 electrode for Li-ion batteries
178XPS study of homemade plasma enhanced atomic layer deposited La2O3/ZrO2 bilayer thin films
179ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition
180ZrO2 Gate Dielectric Deposited by Plasma-Enhanced Atomic Layer Deposition Method