Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition
Type:
Journal
Info:
Journal of Applied Physics 114, 173511 (2013)
Date:
2013-10-21
Author Information
Name | Institution |
---|---|
Hyunsoo Jung | Hanyang University |
Hagyoung Choi | Hanyang University |
Heeyoung Jeon | Hanyang University |
Sanghun Lee | Hanyang University |
Hyeongtag Jeon | Hanyang University |
Films
Film/Plasma Properties
Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Compositional Depth Profiling
Analysis: AES, Auger Electron Spectroscopy
Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Plasma Species
Analysis: FHM, Floating Harmonic Method
Substrates
PES, Poly(Ether Sulfone) |
Keywords
Encapsulation |
Diffusion Barrier |
Notes
575 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |