The publication database currently has 1673 entries.
Use Advanced Search for more complex searches
Recent Database Additions
Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition
Type:
Journal
Info:
Journal of Applied Physics 114, 173511 (2013)
Date:
2013-10-21
Author Information
| Name | Institution |
|---|---|
| Hyunsoo Jung | Hanyang University |
| Hagyoung Choi | Hanyang University |
| Heeyoung Jeon | Hanyang University |
| Sanghun Lee | Hanyang University |
| Hyeongtag Jeon | Hanyang University |
Films
Film/Plasma Properties
Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Compositional Depth Profiling
Analysis: AES, Auger Electron Spectroscopy
Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Plasma Species
Analysis: FHM, Floating Harmonic Method
Substrates
| PES, Poly(Ether Sulfone) |
Keywords
| Encapsulation |
| Diffusion Barrier |
Notes
| 575 |