Your search for plasma enhanced atomic layer deposition publications authored by Sanghun Lee returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Moisture Barrier Properties of Al2O3 Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures|
|2||Permeation barrier properties of an Al2O3/ZrO2 multilayer deposited by remote plasma atomic layer deposition|
|3||Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition|
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