Publication Information

Title:
Permeation barrier properties of an Al2O3/ZrO2 multilayer deposited by remote plasma atomic layer deposition
Type:
Journal
Info:
Current Applied Physics 14 (2014) 552-557
Date:
2013-11-30

Author Information

Name Institution
Sanghun LeeHanyang University

Films

Plasma Al2O3



Film/Plasma Properties

Substrates

Keywords

Notes

220