Publication Information

Title: Permeation barrier properties of an Al2O3/ZrO2 multilayer deposited by remote plasma atomic layer deposition

Type: Journal

Info: Current Applied Physics 14 (2014) 552-557

Date: 2013-11-30

DOI: http://dx.doi.org/10.1016/j.cap.2013.11.053

Author Information

Name

Institution

Hanyang University

Films

Plasma Al2O3 using Custom

Deposition Temperature = 100C

75-24-1

7782-44-7

Plasma ZrO2 using Custom

Deposition Temperature = 100C

175923-04-3

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

220



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