Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Permeation barrier properties of an Al2O3/ZrO2 multilayer deposited by remote plasma atomic layer deposition
Type:
Journal
Info:
Current Applied Physics 14 (2014) 552-557
Date:
2013-11-30
Author Information
Name | Institution |
---|---|
Sanghun Lee | Hanyang University |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
220 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |