Search 1636 plasma ALD publications by:
TEMAZr, (EtMeN)4Zr, [(C2H5)(CH3)N]4Zr, Tetrakis(EthylMethylAmido) Zirconium, Zirconium Ethylmethylamide, CAS# 175923-04-3
Where to buy
|1||Strem Chemicals, Inc.||🇺🇸||Tetrakis(ethylmethylamino)zirconium(IV) 99% TEMAZ, contained in 50 ml cylinder for CVD/ALD|
|3||Strem Chemicals, Inc.||🇺🇸||Tetrakis(ethylmethylamino)zirconium, 99% TEMAZ|
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 30 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.