Ferroelectricity in hafnia controlled via surface electrochemical state
Type:
Journal
Info:
Nat. Mater. 22, 1144-1151 (2023)
Date:
2023-06-23
Author Information
| Name | Institution |
|---|---|
| Kyle P. Kelley | Oak Ridge National Laboratory |
| Anna N. Morozovska | National Academy of Science of Ukraine |
| Eugene A. Eliseev | National Academy of Science of Ukraine |
| Yongtao Liu | Oak Ridge National Laboratory |
| Shelby S. Fields | University of Virginia |
| Samantha T. Jaszewski | University of Virginia |
| Takanori Mimura | University of Virginia |
| Sebastian Calderon | Carnegie Mellon University |
| Elizabeth C. Dickey | Carnegie Mellon University |
| Jon F. Ihlefeld | University of Virginia |
| Sergei V. Kalinin | University of Tennessee |
Films
Plasma HfZrO2
Film/Plasma Properties
Characteristic: Polarization
Analysis: Ferroelectrical Testing
Characteristic: Piezoelectric properties
Analysis: PFM Piezo Force Microscopy
Substrates
| TaN |
Notes
| 1743 |