Inductively coupled plasma sources from Plasma ALD, LLC.


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Jon F. Ihlefeld Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jon F. Ihlefeld returned 2 record(s).

NumberTitle
1Ferroelectricity in hafnia controlled via surface electrochemical state
2Origin of Ferroelectric Phase Stabilization via the Clamping Effect in Ferroelectric Hafnium Zirconium Oxide Thin Films