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Kyle P. Kelley Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kyle P. Kelley returned 2 record(s).

NumberTitle
1Origin of Ferroelectric Phase Stabilization via the Clamping Effect in Ferroelectric Hafnium Zirconium Oxide Thin Films
2Ferroelectricity in hafnia controlled via surface electrochemical state