Publication Information

Title: Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process

Type: Journal

Info: Thin Solid Films Volume 577, 27 February 2015, Pages 143-148

Date: 2015-01-21

DOI: http://dx.doi.org/10.1016/j.tsf.2015.01.040

Author Information

Name

Institution

Kyung Hee University

Kyung Hee University

Kyung Hee University

Films

Plasma Al2O3 using Custom

Deposition Temperature = 120C

75-24-1

7782-44-7

Plasma ZrO2 using Custom

Deposition Temperature = 120C

175923-04-3

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Unknown

TEM, Transmission Electron Microscope

-

Unknown

Ellipsometry

J.A. Woollam VASE

Optical Properties

Optical Transmission

-

Substrates

PEN, Polyethylene Napthalate

Keywords

Diffusion Barrier

Nanolaminate

Notes

PEALD Al2O3/ZrO2 nanolaminate for flexible display diffusion barrier

324



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