Publication Information

Title:
Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process
Type:
Journal
Info:
Thin Solid Films Volume 577, 27 February 2015, Pages 143-148
Date:
2015-01-21

Author Information

Name Institution
Jong Geol LeeKyung Hee University
Hyun Gi KimKyung Hee University
Sung Soo KimKyung Hee University

Films

Plasma Al2O3



Film/Plasma Properties

Characteristic: Unknown
Analysis: TEM, Transmission Electron Microscope

Characteristic: Unknown
Analysis: Ellipsometry

Characteristic: Optical Properties
Analysis: Optical Transmission

Substrates

PEN, Polyethylene Napthalate

Keywords

Diffusion Barrier
Nanolaminate

Notes

PEALD Al2O3/ZrO2 nanolaminate for flexible display diffusion barrier
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