Hyun Gi Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyun Gi Kim returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process
2Enhancement of barrier properties of aluminum oxide layer by optimization of plasma-enhanced atomic layer deposition process
3Self-assembled monolayers as a defect sealant of Al2O3 barrier layers grown by atomic layer deposition