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  • Plasma-Enhanced Atomic Layer Deposition
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Hyun Gi Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyun Gi Kim returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Self-assembled monolayers as a defect sealant of Al2O3 barrier layers grown by atomic layer deposition
2Enhancement of barrier properties of aluminum oxide layer by optimization of plasma-enhanced atomic layer deposition process
3Optical in situ monitoring of plasma-enhanced atomic layer deposition process
4Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process