The publication database currently has 1531 entries.
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189 Films Compositions
401 Precursors and Plasma Gases
74 Deposition Hardwares
239 Film and Plasma Characteristics
82 Theses
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Recent Database Additions
Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers
Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
Search 1531 plasma ALD publications by:
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Where to buy TMA, AlMe3, Trimethyl Aluminum
TMA, AlMe3, Trimethyl Aluminum is available from the following source(s):
| Number | Vendor | Link |
|---|---|---|
| 1 | Strem Chemicals, Inc. | Trimethylaluminum, elec. gr. (99.999+%-Al), contained in 50 ml electropolished cylinder for CVD/ALD |
| 2 | Strem Chemicals, Inc. | Trimethylaluminum, min. 98% (Material sold in non-returnable cylinder) |
| 3 | Strem Chemicals, Inc. | Trimethylaluminum, elec. gr. (99.999+%-Al), contained in 50 ml cylinder for CVD/ALD |
| 4 | Strem Chemicals, Inc. | Trimethylaluminum, elec. gr. (99.999+%-Al) |
| 5 | Strem Chemicals, Inc. | Trimethylaluminum, min. 98%, contained in high-temp 50 ml cylinder for CVD/ALD |
| 6 | Sigma-Aldrich, Co. LLC | Trimethylaluminum 97% |
| 7 | Strem Chemicals, Inc. | Trimethylaluminum, min. 98%, contained in 50 ml cylinder for CVD/ALD |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
| Hyeongtag Jeon |
| Hyungjun Kim |
| Mauritius C. M. (Richard) van de Sanden |
| Christophe Detavernier |