The publication database currently has 1573 entries.
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196 Films Compositions
265 Precursors and Plasma Gases
76 Deposition Hardwares
242 Film and Plasma Characteristics
84 Theses
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Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
Microstructure and Interfaces of Ultra-Thin Epitaxial AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition at Relatively Low Temperatures
Search 1573 plasma ALD publications by:
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Where to buy TMA, AlMe3, Trimethyl Aluminum
TMA, AlMe3, Trimethyl Aluminum is available from the following source(s):
| Number | Vendor | Link |
|---|---|---|
| 1 | Strem Chemicals, Inc. | Trimethylaluminum, elec. gr. (99.999+%-Al) |
| 2 | Strem Chemicals, Inc. | Trimethylaluminum, min. 98%, contained in high-temp 50 ml cylinder for CVD/ALD |
| 3 | Strem Chemicals, Inc. | Trimethylaluminum, min. 98%, contained in 50 ml cylinder for CVD/ALD |
| 4 | Strem Chemicals, Inc. | Trimethylaluminum, elec. gr. (99.999+%-Al), contained in 50 ml cylinder for CVD/ALD |
| 5 | Sigma-Aldrich, Co. LLC | Trimethylaluminum 97% |
| 6 | Strem Chemicals, Inc. | Trimethylaluminum, elec. gr. (99.999+%-Al), contained in 50 ml electropolished cylinder for CVD/ALD |
| 7 | EpiValence | Aluminium trimethyl |
| 8 | Strem Chemicals, Inc. | Trimethylaluminum, min. 98% (Material sold in non-returnable cylinder) |
| 9 | American Elements | Trimethylaluminum |