Publication Information

Title:
Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
Type:
Journal
Info:
Journal of Applied Physics 116, 024508 (2014)
Date:
2014-06-02

Author Information

Name Institution
Nasir AlimardaniOregon State University
Sean W. KingIntel Corporation
Benjamin L. FrenchIntel Corporation
Cheng TanOregon State University
Benjamin P. LampertOregon State University
John F. Conley, Jr.Oregon State University

Films

Thermal Nb2O5


Thermal Ta2O5




Thermal Al2O3



Film/Plasma Properties

Characteristic: Band Gap
Analysis: REELS, Reflection Electron Energy Loss Spectroscopy

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction

Characteristic: Dielectric Constant, Permittivity
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: I-V Plots
Analysis: I-V, Current-Voltage Measurements

Characteristic: Band Defects
Analysis: REELS, Reflection Electron Energy Loss Spectroscopy

Substrates

ZCAN (ZrCuAlNi)

Keywords

MIM Diode

Notes

No annealing to avoid crystallization of ALD films or ZCAN substrate.
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