Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:

  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Nb2O5 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Nb2O5 films returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Alloyed 2D Metal-Semiconductor Atomic Layer Junctions
2Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
3Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition
4Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition
5Radical Enhanced Atomic Layer Deposition of Metals and Oxides
6Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
7In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications