Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Nb2O5 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Nb2O5 films returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Radical Enhanced Atomic Layer Deposition of Metals and Oxides
2Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
3Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition
4Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition
5In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
6Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
7Alloyed 2D Metal-Semiconductor Atomic Layer Junctions