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Publication Information

Title: Alloyed 2D Metal-Semiconductor Atomic Layer Junctions

Type: Journal

Info: Nano Lett., 2016, 16 (3), pp 1890-1895

Date: 2016-02-03

DOI: http://dx.doi.org/10.1021/acs.nanolett.5b05036

Author Information

Name

Institution

Korea Institute of Materials Science

Korea Institute of Materials Science

Sungkyunkwan University

Korean Basic Science Institute

Sungkyunkwan University

Korea Institute of Materials Science

Korea Institute of Materials Science

Future Strategy Research Institute

Korea Institute of Materials Science

Gwanju Institute of Science and Technology (GIST)

University of Ulsan

Korea Institute of Materials Science

Korea Institute of Materials Science

Korea Institute of Materials Science

Rice University

Inha University

Korea Institute of Materials Science

Films

Plasma Nb2O5 using Custom

Deposition Temperature Range N/A

7783-68-8

1333-74-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Substrates

WO3

Keywords

Notes

PEALD details in supplementary information.

766


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