Niobium Pentafluoride, Niobium(V) fluoride, NbF5, CAS# 7783-68-8

Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition
2Alloyed 2D Metal-Semiconductor Atomic Layer Junctions
3Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition