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The publication database currently has 1567 entries.

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195 Films Compositions

265 Precursors and Plasma Gases

76 Deposition Hardwares

242 Film and Plasma Characteristics

84 Theses

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Recent Database Additions

In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films Influence of oxygen source on the ferroelectric properties of ALD grown Hf_1-xZr_xO₂ films

Search 1567 plasma ALD publications by:

195 Films Compositions

265 Precursors and Plasma Gases

76 Deposition Hardwares

242 Film and Plasma Characteristics

Where to buy on-site H₂ generators.

On-site H₂ generators are available from the following source(s):

Number	Vendor	Link
1	Proton OnSite	Benchtop Hydrogen Generators - 200 to 600cc/min