Publication Information

Title:
Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition
Type:
Journal
Info:
Applied Optics, Vol. 59, No. 5, 2020
Date:
2019-10-31

Author Information

Name Institution
Eric DickeyLotus Applied Technology
Kalle NiiranenBeneq Oy
Bryan DanforthLotus Applied Technology
William A. BarrowLotus Applied Technology

Films

Plasma Nb2O5


Plasma SiO2

Hardware used: Custom Spatial


CAS#: 7782-44-7

Film/Plasma Properties

Characteristic: Transmittance
Analysis: -

Characteristic: Uniformity
Analysis: Optical Reflectivity

Substrates

SiO2

Keywords

Notes

1522