Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition

Type:
Journal
Info:
Applied Optics, Vol. 59, No. 5, 2020
Date:
2019-10-31

Author Information

Name Institution
Eric DickeyLotus Applied Technology
Kalle NiiranenBeneq Oy
Bryan DanforthLotus Applied Technology
William A. BarrowLotus Applied Technology

Films

Plasma Nb2O5


Plasma SiO2


Film/Plasma Properties

Characteristic: Transmittance
Analysis: -

Characteristic: Uniformity
Analysis: Optical Reflectivity

Substrates

SiO2

Keywords

Notes

1522