Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Eric Dickey Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Eric Dickey returned 2 record(s).

NumberTitle
1High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films
2Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition