Custom Spatial Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Spatial hardware returned 10 records.

Number	Title
1	Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
2	Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnO_x as conductive gas diffusion barrier
3	Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al₂O₃
4	Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources
5	Temporal and spatial atomic layer deposition of Al-doped zinc oxide as a passivating conductive contact for silicon solar cells
6	Temperature study of atmospheric-pressure plasma-enhanced spatial ALD of Al₂O₃ using infrared and optical emission spectroscopy
7	Development of Space Divided PE-ALD System and Process Design for Gap-Fill Process in Advanced Memory Devices
8	Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO₂ Studied by Gas-Phase Infrared and Optical Emission Spectroscopy
9	Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition
10	Flexible Al₂O₃/plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition process