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Flexible Al2O3/plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition process

Type:
Journal
Info:
Journal of Vacuum Science & Technology A 38, 022418 (2020)
Date:
2020-02-03
DOI:
http://dx.doi.org/10.1116/1.5130727

Author Information

Name Institution
Sun Jung KimSungkyunkwan University
Sang Heon YongSungkyunkwan University
You Jin ChoiSungkyunkwan University
Hyeok HwangboSungkyunkwan University
Woo-Young YangSamsung Advanced Institute of Technology
Heeyeop ChaeSungkyunkwan University

Films

Plasma Al2O3

Hardware used: Custom Spatial
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
N2O, Nitrous Oxide
CAS#: 10024-97-2
Deposition Temperature = 80C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: Nanoview MF-1000

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: JEOL 7500F

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL 2100F

Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Diagnostic: Bruker Optics Tensor 27

Characteristic: Transmittance
Analysis: UV-VIS Spectroscopy
Diagnostic: JASCO V-650

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Seiko Instruments SPA-300HV

Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test
Diagnostic: Custom

Substrates

PEN, Polyethylene Napthalate
Si(100)

Notes

1460