Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

BDIPADS, 1,2-Bis(diisopropylamino)disilane, CAS# 151625-26-2

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s).

NumberTitle
1Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition