Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Kalle Niiranen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kalle Niiranen returned 1 record(s).

NumberTitle
1Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition