HfO2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing HfO2 films returned 167 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces
2Plasma-Enhanced Atomic-Layer Deposition of a HfO2 Gate Dielectric
3Laminated Al2O3-HfO2 layers grown by atomic layer deposition for microelectronics applications
4Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface
5CMOS-compatible Replacement Metal Gate InGaAs-OI FinFET With ION= 156 μA/μm at VDD= 0.5 V and IOFF= 100 nA/μm
6Incorporating Yttrium into a GeO Interfacial Layer with HfO2-Based Gate Stack on Ge
7Distribution and coverage of 40 nm gold nano-particles on aluminum and hafnium oxide using electrophoretic method and fabricated MOS structures
8Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
9Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
10Interface and plasma damage analysis of PEALD TaCN deposited on HfO2 for advanced CMOS studied by angle resolved XPS and C-V
11Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0.53Ga0.47As capacitors with and without an Al2O3 interface control layer
12The Influence of Technology and Switching Parameters on Resistive Switching Behavior of Pt/HfO2/TiN MIM Structures
13Atomic scale nitrogen depth profile control during plasma enhanced atomic layer deposition of high k dielectrics
14Effects of N2 remote plasma nitridation on the structural and electrical characteristics of the HfO2 gate dielectrics grown using remote plasma atomic layer deposition methods
15Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions
16Enhanced interfacial reaction of precursor and low temperature substrate in HfO2 atomic layer deposition with highly Ar diluted O2 plasma
17Comparative study of structural electrical dielectric and ferroelectric properties of HfO2 deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET
18Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
19Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
20High pulsed current density β-Ga2O3 MOSFETs verified by an analytical model corrected for interface charge
21Ultrasensitive Detection of 2,4-Dinitrophenol Using Nanowire Biosensor
22Interfacial Self-Cleaning during PEALD HfO2 Process on GaAs Using TDMAH/O2 with Different (NH4)2S Cleaning Time
23Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
24Interaction of hydrogen with hafnium dioxide grown on silicon dioxide by the atomic layer deposition technique
25Electrical Measurement Under Atmospheric Conditons of PbSe Nanocrystal Thin Films Passivated by Remote Plasma Atomic Layer Deposition of Al2O3
26Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
27Plasma-Modified Atomic Layer Deposition
28Total-dose radiation response and and post-irradiation annealing response of Hafnium capacitors
29Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources
30On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes
31Simulation and Fabrication of HfO2 Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD
32Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
33Effect of hydrogen participation on the improvement in electrical characteristics of HfO2 gate dielectrics by post-deposition remote N2 , N2/H2, and NH3 plasma treatments
34Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films
35Ion energy control during plasma-enhanced atomic layer deposition: enabling materials control and selective processing in the third dimension
36Plasma-Enhanced Atomic Layer Deposition of HfO2 on Monolayer, Bilayer, and Trilayer MoS2 for the Integration of High-κ Dielectrics in Two-Dimensional Devices
37Characteristics of HfO2 thin films grown by plasma atomic layer deposition
38Resistive switching in HfO2-based atomic layer deposition grown metal-insulator-metal structures
39On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR
40Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering
41High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
42Dynamic threshold voltage influence on Ge pMOSFET hysteresis
43Forming-free metal-oxide ReRAM by oxygen ion implantation process
44AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments
45Atomic layer deposited HfO2/HfSixOyNz stacked gate dielectrics for metal-oxide-semiconductor structures
46Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors
47Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
48A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
49In situ dry cleaning of Si wafer using OF2/NH3 remote plasma with low global warming potential
50Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
51In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
52Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
53Pt/Ta2O5/HfO2-x/Ti Resistive Switching Memory Competing with Multilevel NAND Flash
54Investigation and optimization of HfO2 gate dielectric on N-polar GaN: Impact of surface treatments, deposition, and annealing conditions
55Interface engineering of ALD HfO2-based RRAM with Ar plasma treatment for reliable and uniform switching behaviors
56Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer
57Excellent resistive switching properties of atomic layer-deposited Al2O3/HfO2/Al2O3 trilayer structures for non-volatile memory applications
58High-κ insulating materials for AlGaN/GaN metal insulator semiconductor heterojunction field effect transistors
59Effects of N2 RPN on the Structural and Electrical Characteristics of Remote Plasma Atomic Layer-Deposited HfO2 Films
60Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
61Comparison of passivation layers for AlGaN/GaN high electron mobility transistors
62Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection
63Effect of Nitrogen Incorporation in HfO2 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
64Long period gratings coated with hafnium oxide by plasma-enhanced atomic layer deposition for refractive index measurements
65Characteristics of remote plasma atomic layer-deposited HfO2 films on O2 and N2 plasma-pretreated Si substrates
66Room-Temperature Atomic Layer Deposition of HfO2 By Using Remote Plasma Source
67Improving Thermal Stability and Interface State Density of High-k Stacks by Incorporating Hf into an Interfacial Layer on p-Germanium
68Thermodynamic properties and interfacial layer characteristics of HfO2 thin films deposited by plasma-enhanced atomic layer deposition
69Atomic Layer Deposition of HfO2 Thin Films on Ultrathin SiO2 Formed by Remote Plasma Oxidation
70Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials
71Pt Nanocrystals Embedded in Remote Plasma Atomic-Layer-Deposited HfO2 for Nonvolatile Memory Devices
72Characterization of hafnium oxide resistive memory layers deposited on copper by atomic layer deposition
73A scaled replacement metal gate InGaAs-on-Insulator n-FinFET on Si with record performance
74Interfacial Layer Properties of HfO2 Films Formed by Plasma-Enhanced Atomic Layer Deposition on Silicon
75Characteristics of the HfO2 Thin Films Grown by Remote Plasma Atomic Layer Deposition Method on the Plasma Oxidized Si Substrate
76The effect of atomic layer deposition temperature on switching properties of HfOx resistive RAM devices
77Remote Plasma Atomic Layer Deposition of HfO2 Thin Films Using the Alkoxide Precursor Hf(mp)4
78The reaction pathways of the oxygen plasma pulse in the hafnium oxide atomic layer deposition process
79Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2
80Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition
81Impact of AlN Interfacial Dipole on Effective Work Function of Ni and Band Alignment of Ni/HfO2/In0.53Ga0.47As Gate-Stack
82A sub-1-volt analog metal oxide memristive-based synaptic device with large conductance change for energy-efficient spike-based computing systems
83Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
84Using top graphene layer as sacrificial protection during dielectric atomic layer deposition
85Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
86Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
87Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure
88Interfaces Formed by ALD Metal Oxide Growth on Metal Layers
89HfO2 Thin Film Deposited by Remote Plasma Atomic Layer Deposition Method
90Performance enhancement of InAsSb QW-MOSFETs with in-situ H2 plasma cleaning for gate stack formation
91Flexible integrated circuits and multifunctional electronics based on single atomic layers of MoS2 and graphene
92Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
93Hafnia and alumina on sulphur passivated germanium
94Low Dit HfO2/Al2O3/In0.53Ga0.47As gate stack achieved with plasma-enhanced atomic layer deposition
95Characteristics of HfO2 thin films deposited by plasma-enhanced atomic layer deposition using O2 plasma and N2O plasma
96HfO2/SiO2 anti-reflection films for UV lasers via plasma-enhanced atomic layer deposition
97The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
98Effect of NH3 plasma passivation on the electrical characteristics of a nanolaminated ALD HfAlO on InGaAs MOS capacitor
99Optical properties and bandgap evolution of ALD HfSiOx films
100Hot Carrier Filtering in Solution Processed Heterostructures: A Paradigm for Improving Thermoelectric Efficiency
101Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition
102Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
103Damage evaluation in graphene underlying atomic layer deposition dielectrics
104Highly Uniform, Electroforming-Free, and Self-Rectifying Resistive Memory in the Pt/Ta2O5/HfO2-x/TiN Structure
105Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
106Characteristics of Metal-Oxide-Semiconductor Field-Effect Transistors with HfO2/SiO2/Si and HfO2/SiOxNy/Si Stack Structures Formed by Remote Plasma Technique
107HfO2/HfOxNy/HfO2 Gate Dielectric Fabricated by In Situ Oxidation of Plasma-Enhanced Atomic Layer Deposition HfN Middle Layer
108Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping
109Smart Surface for Elution of Protein-Protein Bound Particles: Nanonewton Dielectrophoretic Forces Using Atomic Layer Deposited Oxides
110Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
111Interface effect on dielectric constant of HfO2/Al2O3 nanolaminate films deposited by plasma-enhanced atomic layer deposition
112Gate-tunable high mobility remote-doped InSb/In1-xAlxSb quantum well heterostructures
113Back-End, CMOS-Compatible Ferroelectric Field-Effect Transistor for Synaptic Weights
114Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks
115Interfaces of high-k dielectrics on GaAs: Their common features and the relationship with Fermi level pinning
116Thermal Stability of ALD HfO2 Thin Films and Interfacial Layers on the Oxynitride Underlayer Formed Using Remote Plasma
117Nanolaminated Al2O3/HfO2 dielectrics for silicon carbide based devices
118Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics
119Effects of Remote Plasma Pre-oxidation of Si Substrates on the Characteristics of ALD-Deposited HfO2 Gate Dielectrics
120Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
121Study on the electrical characteristics of in situ PEALD-passivated HfO2/In0.53Ga0.47As MOSCAP and MOSFET structures
122Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
123Damage free Ar ion plasma surface treatment on In0.53Ga0.47As-on-silicon metal-oxide-semiconductor device
124ALD and PEALD deposition of HfO2 and its effects on the nature of oxygen vacancies
125Infrared study on room-temperature atomic layer deposition of HfO2 using tetrakis(ethylmethylamino)hafnium and remote plasma-excited oxidizing agents
126Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
127Interfacial, Electrical, and Band Alignment Characteristics of HfO2/Ge Stacks with In Situ-Formed SiO2 Interlayer by Plasma-Enhanced Atomic Layer Deposition
128Influence of plasma-based in-situ surface cleaning procedures on HfO2/In0.53Ga0.47As gate stack properties
129An improvement of HfO2/Ge interface by in situ remote N2 plasma pretreatment for Ge MOS devices
130Atomic Layer Densification of AlN Passivation Layer on Epitaxial Ge for Enhancement of Reliability and Electrical Performance of High-K Gate Stacks
131Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition
132Initial reaction of hafnium oxide deposited by remote plasma atomic layer deposition method
133Improvement in electrical characteristics of HfO2 gate dielectrics treated by remote NH3 plasma
134Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
135Optical Properties of HfO2 Thin Films Grown by Atomic Layer Deposition
136Plasma assisted atomic layer deposited hafnium oxide films for silicon surface passivation
137Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2
138Effect of Buffer Layer for HfO2 Gate Dielectrics Grown by Remote Plasma Atomic Layer Deposition
139Plasma Enhanced Atomic Layer Deposition Passivated HfO2/AlN/In0.53Ga0.47As MOSCAPs With Sub-Nanometer Equivalent Oxide Thickness and Low Interface Trap Density
140Room-temperature and high-quality HfO2/SiO2 gate stacked film grown by neutral beam enhanced atomic layer deposition
141Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition
142Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
143Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
144Effects of Fluorine Plasma Treatment on the Electronic Structure of Plasma-Enhanced Atomic Layer Deposition HfO2
145Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
146The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfOxNy prepared by in situ nitridation
147Wideband frequency and in situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors
148Trapped charge densities in Al2O3-based silicon surface passivation layers
149Comparison between thermal and plasma enhanced atomic layer deposition processes for the growth of HfO2 dielectric layers
150Bipolar Resistive Switching Characteristics of HfO2/TiO2/HfO2 Trilayer-Structure RRAM Devices on Pt and TiN-Coated Substrates Fabricated by Atomic Layer Deposition
151Composition, structure, and electrical characteristics of HfO2 gate dielectrics grown using the remote- and direct-plasma atomic layer deposition methods
152Symmetrical Al2O3-based passivation layers for p- and n-type silicon
153On the Contact Optimization of ALD-Based MoS2 FETs: Correlation of Processing Conditions and Interface Chemistry with Device Electrical Performance
154Breakdown and Protection of ALD Moisture Barrier Thin Films
155High quality HfO2/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8nm equivalent oxide thickness
156Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition
157Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition
158PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases
159Surface Passivation of Silicon Using HfO2 Thin Films Deposited by Remote Plasma Atomic Layer Deposition System
160Synaptic Plasticity and Learning Behaviors Mimicked in Single Inorganic Synapses of Pt/HfOx/ZnOx/TiN Memristive System
161The effects of plasma treatment on the thermal stability of HfO2 thin films
162Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
163Effects of rapid thermal annealing on the properties of HfO2/La2O3 nanolaminate films deposited by plasma enhanced atomic layer deposition
164Electrical Properties of Atomic Layer Deposition HfO2 and HfOxNy on Si Substrates with Various Crystal Orientations
165Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
166Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition