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Publication Information

Title: Breakdown and Protection of ALD Moisture Barrier Thin Films

Type: Journal

Info: ACS Appl. Mater. Interfaces, 2015, 7 (40), pp 22121-22127

Date: 2015-09-24

DOI: http://dx.doi.org/10.1021/acsami.5b06891

Author Information

Name

Institution

Technische Universität Dresden

Technische Universität Dresden

NaMLab gGmbH

NaMLab gGmbH

NaMLab gGmbH

NaMLab gGmbH

Technische Universität Dresden

Technische Universität Dresden

Technische Universität Dresden

Technische Universität Dresden

Technische Universität Dresden

Technische Universität Dresden

Films

Thermal Al2O3 using Beneq TFS-500

Deposition Temperature = 80C

75-24-1

10028-15-6

Thermal TiO2 using Beneq TFS-500

Deposition Temperature = 80C

7550-45-0

7732-18-5

Thermal Alucone using Beneq TFS-500

Deposition Temperature = 80C

75-24-1

107-21-1

Deposition Temperature = 80C

352535-01-4

7732-18-5

Deposition Temperature = 80C

27804-64-4

7782-44-7

Plasma Al2O3 using SENTECH

Deposition Temperature = 100C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Water Vapor Transmission Rate (WVTR)

Calcium Test

Custom

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

AIST-NT Combiscope

Density

XRR, X-Ray Reflectivity

Unknown

Substrates

Glass

Calcium

Keywords

Notes

396

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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