The publication database currently has 1700 entries.
Use Advanced Search for more complex searches
Innatiux is a retained executive recruiting firm with a focus on the search and placement of proven leaders for client companies in the field of high-tech capital equipment and analytical instrumentation. We are seeking WW technical and business leaders with a background in semiconductor deposition to fill confidential senior and executive level positions with our clients. Visit us at: www.innatiux.com
Breakdown and Protection of ALD Moisture Barrier Thin Films
Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2015, 7 (40), pp 22121-22127
Date:
2015-09-24
Author Information
| Name | Institution |
|---|---|
| Frederik Nehm | Technische Universität Dresden |
| Hannes Klumbies | Technische Universität Dresden |
| Claudia Richter | NaMLab gGmbH |
| Aarti Singh | NaMLab gGmbH |
| Uwe Schroeder | NaMLab gGmbH |
| Thomas Mikolajick | NaMLab gGmbH |
| Tobias Mönch | Technische Universität Dresden |
| Christoph Hoßbach | Technische Universität Dresden |
| Matthias Albert | Technische Universität Dresden |
| Johann W. Bartha | Technische Universität Dresden |
| Karl Leo | Technische Universität Dresden |
| Lars Müller-Meskamp | Technische Universität Dresden |
Films
Thermal Al2O3
Thermal TiO2
Thermal Alucone
Thermal HfO2
Plasma SiO2
Film/Plasma Properties
Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Substrates
| Glass |
| Calcium |
Notes
| 396 |