The publication database currently has 1700 entries.
Use Advanced Search for more complex searches
Innatiux is a retained executive recruiting firm with a focus on the search and placement of proven leaders for client companies in the field of high-tech capital equipment and analytical instrumentation. We are seeking WW technical and business leaders with a background in semiconductor deposition to fill confidential senior and executive level positions with our clients. Visit us at: www.innatiux.com
Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
Type:
Journal
Info:
Appl. Phys. Lett. 103, 263115 (2013)
Date:
2013-12-12
Author Information
| Name | Institution |
|---|---|
| Yoontae Hwang | University of California - San Diego |
| Binh-Minh Nguyen | University of California - San Diego |
| Shadi A. Dayeh | University of California - San Diego |
Films
Plasma Pt
Plasma Pt
Thermal HfO2
Film/Plasma Properties
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Resistivity, Sheet Resistance
Analysis: TLM, Transmission Line Measurement
Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Characteristic: Interfacial Layer
Analysis: TEM, Transmission Electron Microscope
Characteristic: Transistor Characteristics
Analysis: -
Substrates
| SiO2 |
| HfO2 |
Notes
| Picosun SUNALE R-200 Pt with reduced nucleation delay through TMA prepulse optimization. |
| 170 |