TDMAHf, tetrakis(dimethylamido)hafnium, hafnium dimethylamide, (Me2N)4Hf, also CAS# 19782-68-4, CAS# 19962-11-9

Informational Websites

NumberWebsite
1https://pubchem.ncbi.nlm.nih.gov/compound/140609#section=Top

Where to buy

NumberVendorRegionLink
1American Elements🇺🇸Tetrakis(dimethylamido)hafnium(IV)
2Strem Chemicals, Inc.🇺🇸Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2%-Zr) TDMAH, contained in 50 ml cylinder for CVD/ALD
3Strem Chemicals, Inc.🇺🇸Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2% Zr) TDMAH
4Ereztech🇺🇸Tetrakis(dimethylamino) hafnium(IV)
5Apollo Scientific🇬🇧Tetrakis(dimethylamino)hafnium(IV) 99.999%
6Strem Chemicals, Inc.🇺🇸Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2%-Zr) TDMAH, contained in 50 ml cylinder with high temperature valve for CVD/ALD
7Gelest🇺🇸Hafnium Dimethylamide
8DOCK/CHEMICALS🇩🇪Tetrakis(dimethylamido)hafnium
9Sigma-Aldrich, Co. LLC🇺🇸Tetrakis(dimethylamido)hafnium(IV) 99.99%

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 75 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Annealing behavior of ferroelectric Si-doped HfO2 thin films
2The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfOxNy prepared by in situ nitridation
3Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
4Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
5Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition
6Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials
7Electrical and structural properties of conductive nitride films grown by plasma enhanced atomic layer deposition with significant ion bombardment effect
8Plasma-Enhanced Atomic Layer Deposition of HfO2 on Monolayer, Bilayer, and Trilayer MoS2 for the Integration of High-κ Dielectrics in Two-Dimensional Devices
9Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition
10Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
11High quality HfO2/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8nm equivalent oxide thickness
12Band Offsets for Atomic Layer Deposited HfSiO4 on (Al0.14Ga0.86)2O3
13Enhanced electrical and reliability characteristics in HfON gated Ge p-MOSFETs with H2 and NH3 plasma treated interfacial layers
14Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
15Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes
16Nanolaminated Al2O3/HfO2 dielectrics for silicon carbide based devices
17A sub-1-volt analog metal oxide memristive-based synaptic device with large conductance change for energy-efficient spike-based computing systems
18Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
19Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition
20Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
21Improving Thermal Stability and Interface State Density of High-k Stacks by Incorporating Hf into an Interfacial Layer on p-Germanium
22Nonvolatile Capacitive Crossbar Array for In-Memory Computing
23In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
24AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments
25Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition
26The effects of layering in ferroelectric Si-doped HfO2 thin films
27Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
28HfO2/HfOxNy/HfO2 Gate Dielectric Fabricated by In Situ Oxidation of Plasma-Enhanced Atomic Layer Deposition HfN Middle Layer
29TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
30Gate-tunable high mobility remote-doped InSb/In1-xAlxSb quantum well heterostructures
31Atomic scale nitrogen depth profile control during plasma enhanced atomic layer deposition of high k dielectrics
32Interfacial Self-Cleaning during PEALD HfO2 Process on GaAs Using TDMAH/O2 with Different (NH4)2S Cleaning Time
33Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
34Atomic Layer Densification of AlN Passivation Layer on Epitaxial Ge for Enhancement of Reliability and Electrical Performance of High-K Gate Stacks
35Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping
36A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
37Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering
38On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR
39Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions
40Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
41Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
42Smart Surface for Elution of Protein-Protein Bound Particles: Nanonewton Dielectrophoretic Forces Using Atomic Layer Deposited Oxides
43HfO2/HfOxNy/HfO2 Gate Dielectric Fabricated by In Situ Oxidation of Plasma-Enhanced Atomic Layer Deposition HfN Middle Layer
44Effects of Fluorine Plasma Treatment on the Electronic Structure of Plasma-Enhanced Atomic Layer Deposition HfO2
45ALD and PEALD deposition of HfO2 and its effects on the nature of oxygen vacancies
46Long period gratings coated with hafnium oxide by plasma-enhanced atomic layer deposition for refractive index measurements
47Using top graphene layer as sacrificial protection during dielectric atomic layer deposition
48Characterization of HfOxNy thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas
49Band alignment of atomic layer deposited SiO2 and HfSiO4 with $(\bar{2}01)$ β-Ga2O3
50Effects of Fluorine Plasma Treatment on the Electronic Structure of Plasma-Enhanced Atomic Layer Deposition HfO2
51Highly Conductive HfNx Films Prepared by Plasma-Assisted Atomic Layer Deposition
52Characterization of hafnium oxide resistive memory layers deposited on copper by atomic layer deposition
53Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition
54Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
55Atomic scale nitrogen depth profile control during plasma enhanced atomic layer deposition of high k dielectrics
56Thermal stability of antiferroelectric-like Al:HfO2 thin films with TiN or Pt electrodes
57Investigation and optimization of HfO2 gate dielectric on N-polar GaN: Impact of surface treatments, deposition, and annealing conditions
58Electrical Properties of Atomic Layer Deposition HfO2 and HfOxNy on Si Substrates with Various Crystal Orientations
59Nanocrystallite Seeding of Metastable Ferroelectric Phase Formation in Atomic Layer-Deposited Hafnia-Zirconia Alloys
60Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping
61Comparative study of structural electrical dielectric and ferroelectric properties of HfO2 deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET
62Incorporating Yttrium into a GeO Interfacial Layer with HfO2-Based Gate Stack on Ge
63Electrical Properties of Atomic Layer Deposition HfO2 and HfOxNy on Si Substrates with Various Crystal Orientations
64Optical Properties of HfO2 Thin Films Grown by Atomic Layer Deposition
65Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition
66Performance enhancement of InAsSb QW-MOSFETs with in-situ H2 plasma cleaning for gate stack formation
67Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
68A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
69The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfOxNy prepared by in situ nitridation
70HfO2/HfOxNy/HfO2 Gate Dielectric Fabricated by In Situ Oxidation of Plasma-Enhanced Atomic Layer Deposition HfN Middle Layer
71Damage evaluation in graphene underlying atomic layer deposition dielectrics
72Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics
73Comparison between thermal and plasma enhanced atomic layer deposition processes for the growth of HfO2 dielectric layers
74Laminated Al2O3-HfO2 layers grown by atomic layer deposition for microelectronics applications
75Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition