Search 1553 plasma ALD publications by:
Search 1553 plasma ALD publications by:
TDMAHf, (Me2N)4Hf, [(CH3)2N]4Hf, Tetrakis(DiMethylAmido) Hafnium, Hafnium Dimethylamide, also CAS# 19782-68-4, CAS# 19962-11-9
Informational Websites
Number | Website |
---|---|
1 | https://pubchem.ncbi.nlm.nih.gov/compound/140609#section=Top |
Where to buy
Number | Vendor | Link |
---|---|---|
1 | Ereztech | Tetrakis(dimethylamino) hafnium(IV) |
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 64 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |