Publication Information

Title: Damage evaluation in graphene underlying atomic layer deposition dielectrics

Type: Journal

Info: Scientific Reports 5, Article number: 13523 (2015)

Date: 2015-07-27

DOI: http://dx.doi.org/10.1038/srep13523

Author Information

Name

Institution

Universite catholique de Louvain (UCL)

University of Namur

Universite catholique de Louvain (UCL)

University of Namur

Universite catholique de Louvain (UCL)

University of Antwerp

University of Antwerp

Universite catholique de Louvain (UCL)

University of Namur

Universite catholique de Louvain (UCL)

Universite catholique de Louvain (UCL)

Universite catholique de Louvain (UCL)

Films

Deposition Temperature = 250C

19962-11-9

7782-44-7

Deposition Temperature = 250C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Unknown

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo Scientific K-Alpha

Raman Spectra

Raman Spectroscopy

Horiba Jobin Yvon LabRAM HR800 Raman Spectroscope

Substrates

Graphene

Keywords

Notes

381



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