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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Xiaohui Tang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xiaohui Tang returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Using top graphene layer as sacrificial protection during dielectric atomic layer deposition
2Damage evaluation in graphene underlying atomic layer deposition dielectrics
3Room temperature atomic layer deposition of Al2O3 and replication of butterfly wings for photovoltaic application
4Passivation effects of atomic-layer-deposited aluminum oxide