Xiaohui Tang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xiaohui Tang returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Damage evaluation in graphene underlying atomic layer deposition dielectrics
2Passivation effects of atomic-layer-deposited aluminum oxide
3Room temperature atomic layer deposition of Al2O3 and replication of butterfly wings for photovoltaic application
4Using top graphene layer as sacrificial protection during dielectric atomic layer deposition