Benoit Hackens Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Benoit Hackens returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Damage evaluation in graphene underlying atomic layer deposition dielectrics|
|2||Using top graphene layer as sacrificial protection during dielectric atomic layer deposition|