Nicolas Reckinger Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nicolas Reckinger returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Using top graphene layer as sacrificial protection during dielectric atomic layer deposition
2Damage evaluation in graphene underlying atomic layer deposition dielectrics