plasma-ald.com
  • PEALD Publication Database
    Films Precursors Hardware Authors Film and Plasma Characteristics Theses Multi-factor Search
  • Mark's LinkedIn Profile
  • About
  • Contact Us
  • ALD Links
The publication database currently has 1538 entries.
Search from:
189 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
239 Film and Plasma Characteristics
82 Theses

Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)


ALD Links
About plasma-ald.com
Contact Us
Advertising
LinkedIn Profile

Recent Database Additions
Ultrahigh purity conditions for nitride growth with low oxygen content by plasma-enhanced atomic layer deposition α-Ga2O3 grown by low temperature atomic layer deposition on sapphire Remote plasma atomic layer deposition of silicon nitride with bis(dimethylaminomethyl-silyl)trimethylsilyl amine and N2 plasma for gate spacer
Search 1538 plasma ALD publications by:
189 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
239 Film and Plasma Characteristics

Laurent A. Francis Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Laurent A. Francis returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A Capacitance-to-Frequency Converter with On-Chip Passivated Microelectrodes for Bacteria Detection in Saline Buffers up to 575 MHz
2Damage evaluation in graphene underlying atomic layer deposition dielectrics
3Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems
4Effects of radiation and cryogenic temperatures on the electromechanical properties of materials used in microsystems
5Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering
6Lytic enzymes as selectivity means for label-free, microfluidic and impedimetric detection of whole-cell bacteria using ALD-Al2O3 passivated microelectrodes
7Passivation effects of atomic-layer-deposited aluminum oxide
8Room temperature atomic layer deposition of Al2O3 and replication of butterfly wings for photovoltaic application
9Using top graphene layer as sacrificial protection during dielectric atomic layer deposition

© 2014-2021 plasma-ald.com

Popular Films
NbN
AlN
Ag
GaN
SiO2

Recently Added Films
Li3PO4
Co3P2O8
RuTa
RuC
GaAs

Popular Precursors
Bis(DiEthylAmido)Silane
Dicobalt Hexacarbonyl Tert-ButylAcetylene
Tris(DiMethylAmido) Cyclopentadienyl Hafnium
Tris(DiEthylamido) (Tert-Butylimido) Niobium
Trimethoxy(pentamethylcyclopentadienyl) Titanium

Top Authors
Erwin (W.M.M.) Kessels
Hyeongtag Jeon
Hyungjun Kim
Mauritius C. M. (Richard) van de Sanden
Christophe Detavernier