Publication Information

Title:
Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems
Type:
Journal
Info:
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 21, NO.6, 2012
Date:
2012-07-17

Author Information

Name Institution
P. GkotsisUniversite catholique de Louvain (UCL)
V. KilchytskaUniversite catholique de Louvain (UCL)
C. FragkiadakisCranfield University
P. B. KirbyCranfield University
Jean-Pierre RaskinUniversite catholique de Louvain (UCL)
Laurent A. FrancisUniversite catholique de Louvain (UCL)

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Thickness
Analysis: -

Characteristic: Fixed Charge
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: Interface State Density
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: Substrate Impurity Concentration
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: Midgap Voltage
Analysis: C-V, Capacitance-Voltage Measurements

Substrates

Si(100)

Keywords

Radiation Hardness

Notes

643