Veeco - Ultratech - Cambridge NanoTech Fiji Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks
2Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition
3Room temperature atomic layer deposition of Al2O3 and replication of butterfly wings for photovoltaic application
4Thermal stability of antiferroelectric-like Al:HfO2 thin films with TiN or Pt electrodes
5Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
6The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
7Low-Leakage Tetragonal ZrO2 (EOT < 1 nm) With In Situ Plasma Interfacial Passivation on Germanium
8Atomic layer deposition of GaN at low temperatures
9Long period gratings coated with hafnium oxide by plasma-enhanced atomic layer deposition for refractive index measurements
10Comparison of passivation layers for AlGaN/GaN high electron mobility transistors
11An ultra-thin SiO2 ALD layer for void-free bonding of III-V material on silicon
12Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors
13Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric
14Band alignment of atomic layer deposited SiO2 on (010) (Al0.14Ga0.86)2O3
15ALD Protection of Li-Metal Anode Surfaces - Quantifying and Preventing Chemical and Electrochemical Corrosion in Organic Solvent
16ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors
17Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy
18The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
19Engineering Interfacial Silicon Dioxide for Improved Metal-Insulator-Semiconductor Silicon Photoanode Water Splitting Performance
20Annealing Effects on the Band Alignment of ALD SiO2 on (InxGa1-x)2O3 for x = 0.25-0.74
21Plasma-enhanced atomic layer deposition of titanium vanadium nitride
22Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions
23Impact of interface materials on side permeation in indirect encapsulation of organic electronics
24Multiplexed actuation using ultra dielectrophoresis for proteomics applications: a comprehensive electrical and electrothermal design methodology
25Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
26Plasma-Enhanced Atomic Layer Deposition of Ultrathin Oxide Coatings for Stabilized Lithium-Sulfur Batteries
27Tuning The Photoactivity of Zirconia Nanotubes-Based Photoanodes via Ultrathin Layers of ZrN: An Effective Approach toward Visible-Light Water Splitting
28Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
29Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
30Annealing behavior of ferroelectric Si-doped HfO2 thin films
31Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
32Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
33Nonvolatile Capacitive Crossbar Array for In-Memory Computing
34Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
35Characterization of hafnium oxide resistive memory layers deposited on copper by atomic layer deposition
36Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition
37Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
38Design and development of nanoimprint-enabled structures for molecular motor devices
39Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase
40Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
41Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
42Incorporating Yttrium into a GeO Interfacial Layer with HfO2-Based Gate Stack on Ge
43Optical Properties of HfO2 Thin Films Grown by Atomic Layer Deposition
44Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
45Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
46Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
47Advanced thin conformal Al2O3 films for high aspect ratio mercury cadmium telluride sensors
48AlGaN/GaN MIS-HEMT Gate Structure Improvement Using Al2O3 Deposited by PEALD
49Band Offsets for Atomic Layer Deposited HfSiO4 on (Al0.14Ga0.86)2O3
50Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
51Irradiation effects of graphene-enhanced gallium nitride (GaN) metal-semiconductor-metal (MSM) ultraviolet photodetectors
52Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200°C
53Growth of V2O5 Films for Battery Applications by Pulsed Chemical Vapor Deposition
54Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays
55Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
56Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
57Investigation and optimization of HfO2 gate dielectric on N-polar GaN: Impact of surface treatments, deposition, and annealing conditions
58Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
59Interrogation of Electrochemical Properties of Polymer Electrolyte Thin Films with Interdigitated Electrodes
60Lytic enzymes as selectivity means for label-free, microfluidic and impedimetric detection of whole-cell bacteria using ALD-Al2O3 passivated microelectrodes
61Perspectives on future directions in III-N semiconductor research
62Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
63Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
64Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
65Plasma-Enhanced Atomic Layer Deposition of p-Type Copper Oxide Semiconductors with Tunable Phase, Oxidation State, and Morphology
66Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
67Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
68A Capacitance-to-Frequency Converter with On-Chip Passivated Microelectrodes for Bacteria Detection in Saline Buffers up to 575 MHz
69Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
70Damage evaluation in graphene underlying atomic layer deposition dielectrics
71Investigation of hydrogen impurities in PE-ALD AlN thin films by IBA methods
72Plasma-enhanced atomic layer deposition of ruthenium metal on free-standing carbon nanotube forest for 3D flexible binder-less supercapacitor electrodes
73Atomic layer deposition of titanium nitride for quantum circuits
74Effect of Deposition Method on Valence Band Offsets of SiO2 and Al2O3 on (Al0.14Ga0.86)2O3
75Tunable band gap of III-Nitride alloys obtained by Plasma Enhanced Atomic Layer Deposition
76Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
77Use of a passivation layer to improve thermal stability and quality of a phosphorene/AZO heterojunction diode
78Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
79Obtaining low resistivity (~100 µΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
80Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0.53Ga0.47As capacitors with and without an Al2O3 interface control layer
81Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
82Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide
83Using top graphene layer as sacrificial protection during dielectric atomic layer deposition
84In situ x-ray photoelectron emission analysis of the thermal stability of atomic layer deposited WOx as hole-selective contacts for Si solar cells
85Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
86Investigation of ultra-thin titania films as hole-blocking contacts for organic photovoltaics
87Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
88Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition
89Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
90Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
91Band alignment of Al2O3 with (-201) β-Ga2O3
92Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
93ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications
94Influence of the polymeric substrate on the water permeation of alumina barrier films deposited by atomic layer deposition
95Low sheet resistance titanium nitride films by low-temperature plasma-enhanced atomic layer deposition using design of experiments methodology
96Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
97Field-enhanced direct tunneling in ultrathin atomic-layer-deposition-grown Au-Al2O3-Cr metal-insulator-metal structures
98Low-frequency dielectric properties of intrinsic and Al-doped rutile TiO2 thin films grown by the atomic layer deposition technique
99Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
100GaN metal-insulator-semiconductor high-electron-mobility transistor with plasma enhanced atomic layer deposited AlN as gate dielectric and passivation
101Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
102Band alignment of atomic layer deposited SiO2 and HfSiO4 with $(\bar{2}01)$ β-Ga2O3
103High breakdown voltage in AlN/GaN metal-insulator-semiconductor high-electron-mobility transistors
104Investigation of AlGaN/GaN HEMTs Passivated by AlN Films Grown by Atomic Layer Epitaxy
105AlGaN/GaN MIS-HEMTs With High Quality ALD-Al2O3 Gate Dielectric Using Water and Remote Oxygen Plasma As Oxidants
106Self-aligned tip deinsulation of atomic layer deposited Al2O3 and parylene C coated Utah electrode array based neural interfaces
107The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
108Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation
109Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
110Lithium-Iron (III) Fluoride Battery with Double Surface Protection
111High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition
112Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications
113Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
114Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
115Atomic Layer Deposition of the Solid Electrolyte LiPON
116Electrical and structural properties of conductive nitride films grown by plasma enhanced atomic layer deposition with significant ion bombardment effect
117Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
118Plasma-enhanced atomic layer deposition of superconducting niobium nitride
119In0.53Ga0.47As FinFET and GAA-FET With Remote-Plasma Treatment
120Localized dielectric breakdown and antireflection coating in metal-oxide-semiconductor photoelectrodes
121Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
122Applications of nanoNewton dielectrophoretic forces using atomic layer deposited oxides for microfluidic sample preparation and proteomics
123Passivation effects of atomic-layer-deposited aluminum oxide
124The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
125Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
126Impact of Plasma-Assisted Atomic-Layer-Deposited Gate Dielectric on Graphene Transistors
127The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
128Atomic layer deposited Al2O3 capping layer effect on environmentally assisted cracking in SiNx barrier films
129Aluminum oxide – n-Si field effect inversion layer solar cells with organic top contact
130On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR
131Damage free Ar ion plasma surface treatment on In0.53Ga0.47As-on-silicon metal-oxide-semiconductor device
132Sub-7-nm textured ZrO2 with giant ferroelectricity
133Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
134Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
135A fully integrated electronic platform for multiplexed intermolecular force spectroscopy
136Fiber-matrix interface reinforcement using Atomic Layer Deposition
137Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
138Nanoscale Encapsulation of Hybrid Perovskites Using Hybrid Atomic Layer Deposition
139Hydrophilic/hydrophobic surface of Al2O3 thin films grown by thermal and plasma-enhanced atomic layer deposition on plasticized polyvinyl chloride (PVC)
140Ultraviolet Electroluminescence from Nitrogen-Doped ZnO-Based Heterojuntion Light-Emitting Diodes Prepared by Remote Plasma in situ Atomic Layer-Doping Technique
141ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors
142Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
143AlGaN/GaN MIS-HEMT gate structure improvement using Al2O3 deposited by plasma-enhanced ALD
144Microstructure and Interfaces of Ultra-Thin Epitaxial AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition at Relatively Low Temperatures
145Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
146Performance of Samples with Novel SRF Materials and Growth Techniques
147Plasma-induced sub-10nm Au-SnO2-In2O3 heterostructures fabricated by atomic layer deposition for highly sensitive ethanol detection on ppm level
148Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting
149Propagating gene expression fronts in a one-dimensional coupled system of artificial cells
150Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
151New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
152Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
153Programmable on-chip DNA compartments as artificial cells
154Nanocrystallite Seeding of Metastable Ferroelectric Phase Formation in Atomic Layer-Deposited Hafnia-Zirconia Alloys
155Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
156Improvement of Capacitance Equivalent Thickness, Leakage Current, and Interfacial State Density Based on Crystallized High-K Dielectrics/Nitrided Buffer Layer Gate Stacks
157Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
158Smart Surface for Elution of Protein-Protein Bound Particles: Nanonewton Dielectrophoretic Forces Using Atomic Layer Deposited Oxides
159Band offset of Al1-xSixOy mixed oxide on GaN evaluated by hard X-ray photoelectron spectroscopy
160Plasma-enhanced atomic layer deposition of vanadium nitride
161Self-Limiting Growth of GaN at Low Temperatures
162Effect of hydrogen participation on the improvement in electrical characteristics of HfO2 gate dielectrics by post-deposition remote N2 , N2/H2, and NH3 plasma treatments
163Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al2O3 and Parylene C for Biomedical Implantable Devices
164Low temperature plasma-enhanced atomic layer deposition of sodium phosphorus oxynitride with tunable nitrogen content
165ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
166Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
167Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
168Al2O3/SiO2 nanolaminate for a gate oxide in a GaN-based MOS device
169Single-Cell Photonic Nanocavity Probes
170Supportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode
171Hydrogen plasma enhanced oxide removal on GaSb planar and nanowire surfaces
172Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
173Atomic layer deposited Al2O3 and parylene C dual-layer encapsulation for biomedical implantable devices
174Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure
175The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO
176A comparative study on electrical characteristics of crystalline AlN thin films deposited by ICP and HCPA-sourced atomic layer deposition
177Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition
178Thermal Stability of Novel Hole-Selective Contacts for Silicon Wafer Solar Cells
179Impact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics
180Atomic layer deposited (ALD) SnO2 anodes with exceptional cycleability for Li-ion batteries
181Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors
182Excellent surface passivation of crystalline silicon by ternary AlxMg1-xOy thin films
183Enhancement of Electrical Characteristics and Reliability in Crystallized ZrO2 Gate Dielectrics Treated with In-Situ Atomic Layer Doping of Nitrogen
184Effects of radiation and cryogenic temperatures on the electromechanical properties of materials used in microsystems
185Improving Thermal Stability and Interface State Density of High-k Stacks by Incorporating Hf into an Interfacial Layer on p-Germanium
186A high-density carbon fiber neural recording array technology
187In situ atomic layer nitridation on the top and down regions of the amorphous and crystalline high-K gate dielectrics
188Critical-point model dielectric function analysis of WO3 thin films deposited by atomic layer deposition techniques
189Mechanical properties of thin-film Parylene-metal-Parylene devices
190Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
191Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry
192Tin Oxynitride Anodes by Atomic Layer Deposition for Solid-State Batteries
193Suppression of GeOx interfacial layer and enhancement of the electrical performance of the high-K gate stack by the atomic-layer-deposited AlN buffer layer on Ge metal-oxide-semiconductor devices
194Atomic layer deposition of metal-oxide thin films on cellulose fibers
195TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
196Improvement in electrical characteristics of HfO2 gate dielectrics treated by remote NH3 plasma
197Double nitridation of crystalline ZrO2/Al2O3 buffer gate stack with high capacitance, low leakage and improved thermal stability
198Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
199The effects of layering in ferroelectric Si-doped HfO2 thin films
200Sub-nanometer heating depth of atomic layer annealing
201Amorphous alumina thin films deposited on titanium: Interfacial chemistry and thermal oxidation barrier properties
202Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
203Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
204The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
205AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing
206Efficient Modification of Metal Oxide Surfaces with Phosphonic Acids by Spray Coating
207Biofilm prevention on cochlear implants
208Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition
209Ultrathin Surface Coating Enables the Stable Sodium Metal Anode
210Local Electronic Structures and Electrical Characteristics of Well-Controlled Nitrogen-Doped ZnO Thin Films Prepared by Remote Plasma In situ Atomic Layer Doping
211Fully CMOS-compatible titanium nitride nanoantennas
212Atomic layer epitaxy for quantum well nitride-based devices
213Conformal Fe, Co and Ni Films from Oxides and Nitrides Grown by Atomic Layer Deposition
214Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide
215Comparisons of alumina barrier films deposited by thermal and plasma atomic layer deposition
216Tailoring Electron-Transfer Barriers for Zinc Oxide/C60 Fullerene Interfaces
217Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
218RF Characterization of Novel Superconducting Materials and Multilayers
219Investigation of Atomic Layer Deposition Al2O3 Passivation for Screen-Printed Large-Area Solar Cells
220Role of temperature on structure and electrical properties of titanium nitride films grown by low pressure plasma enhanced atomic layer deposition
221Top-down fabrication of fluorine-doped tin oxide nanopillar substrates for solar water splitting
222DC characteristics of ALD-grown Al2O3/AlGaN/GaN MIS-HEMTs and HEMTs at 600°C in air
223Effect of the substrate on structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
224Integration of microwave-annealed oxidation on germanium metal-oxide-semiconductor devices
225Evaluating the Impact of Thermal Annealing on Al2O3/c-Si Interface Properties by Non-Destructive Measurements
226Field-effect passivation of Si by ALD-Al2O3: Second harmonic generation monitoring and simulation
227Near room-temperature direct encapsulation of organic photovoltaics by plasma-based deposition techniques
228Nanotextured surfaces for surface enhanced Raman spectroscopy and sensors
229Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes
230Impact of degradable nanowires on long-term brain tissue responses
231Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
232Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
233Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources
234Nanoshape Imprint Lithography for Fabrication of Nanowire Ultracapacitors
235Plasma-assisted atomic layer deposition of Al2O3 and parylene C bi-layer encapsulation for chronic implantable electronics
236Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
237Molybdenum Disulfide Catalytic Coatings via Atomic Layer Deposition for Solar Hydrogen Production from Copper Gallium Diselenide Photocathodes
238P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
239Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems
240Aluminum Oxide at the Monolayer Limit via Oxidant-Free Plasma-Assisted Atomic Layer Deposition on GaN
241Atomic Layer Densification of AlN Passivation Layer on Epitaxial Ge for Enhancement of Reliability and Electrical Performance of High-K Gate Stacks
242Gate-tunable high mobility remote-doped InSb/In1-xAlxSb quantum well heterostructures
243Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
244Plasma-enhanced atomic layer deposition of tungsten nitride
245Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
246Antireflection In2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition