Veeco - Ultratech - Cambridge NanoTech Fiji Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1A Capacitance-to-Frequency Converter with On-Chip Passivated Microelectrodes for Bacteria Detection in Saline Buffers up to 575 MHz
2A comparative study on electrical characteristics of crystalline AlN thin films deposited by ICP and HCPA-sourced atomic layer deposition
3A fully integrated electronic platform for multiplexed intermolecular force spectroscopy
4A high-density carbon fiber neural recording array technology
5Advanced thin conformal Al2O3 films for high aspect ratio mercury cadmium telluride sensors
6Al2O3/SiO2 nanolaminate for a gate oxide in a GaN-based MOS device
7ALD Protection of Li-Metal Anode Surfaces - Quantifying and Preventing Chemical and Electrochemical Corrosion in Organic Solvent
8ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications
9ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
10ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors
11ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors
12AlGaN/GaN MIS-HEMT Gate Structure Improvement Using Al2O3 Deposited by PEALD
13AlGaN/GaN MIS-HEMT gate structure improvement using Al2O3 deposited by plasma-enhanced ALD
14AlGaN/GaN MIS-HEMTs With High Quality ALD-Al2O3 Gate Dielectric Using Water and Remote Oxygen Plasma As Oxidants
15AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing
16Aluminum oxide – n-Si field effect inversion layer solar cells with organic top contact
17Amorphous alumina thin films deposited on titanium: Interfacial chemistry and thermal oxidation barrier properties
18An ultra-thin SiO2 ALD layer for void-free bonding of III-V material on silicon
19Annealing behavior of ferroelectric Si-doped HfO2 thin films
20Annealing Effects on the Band Alignment of ALD SiO2 on (InxGa1-x)2O3 for x = 0.25-0.74
21Antireflection In2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition
22Applications of nanoNewton dielectrophoretic forces using atomic layer deposited oxides for microfluidic sample preparation and proteomics
23Atomic Layer Densification of AlN Passivation Layer on Epitaxial Ge for Enhancement of Reliability and Electrical Performance of High-K Gate Stacks
24Atomic layer deposited (ALD) SnO2 anodes with exceptional cycleability for Li-ion batteries
25Atomic layer deposited Al2O3 and parylene C dual-layer encapsulation for biomedical implantable devices
26Atomic layer deposited Al2O3 capping layer effect on environmentally assisted cracking in SiNx barrier films
27Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
28Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
29Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
30Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
31Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
32Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors
33Atomic layer deposition of GaN at low temperatures
34Atomic layer deposition of metal-oxide thin films on cellulose fibers
35Atomic Layer Deposition of the Solid Electrolyte LiPON
36Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications
37Atomic layer deposition of titanium nitride for quantum circuits
38Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
39Atomic layer epitaxy for quantum well nitride-based devices
40Band alignment of Al2O3 with (-201) β-Ga2O3
41Band alignment of atomic layer deposited SiO2 on (010) (Al0.14Ga0.86)2O3
42Band alignment of atomic layer deposited SiO2 and HfSiO4 with $(\bar{2}01)$ β-Ga2O3
43Band offset of Al1-xSixOy mixed oxide on GaN evaluated by hard X-ray photoelectron spectroscopy
44Band Offsets for Atomic Layer Deposited HfSiO4 on (Al0.14Ga0.86)2O3
45Biofilm prevention on cochlear implants
46Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition
47Comparison of passivation layers for AlGaN/GaN high electron mobility transistors
48Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200°C
49Comparisons of alumina barrier films deposited by thermal and plasma atomic layer deposition
50Conformal Fe, Co and Ni Films from Oxides and Nitrides Grown by Atomic Layer Deposition
51Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
52Critical-point model dielectric function analysis of WO3 thin films deposited by atomic layer deposition techniques
53Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
54Damage evaluation in graphene underlying atomic layer deposition dielectrics
55Damage free Ar ion plasma surface treatment on In0.53Ga0.47As-on-silicon metal-oxide-semiconductor device
56DC characteristics of ALD-grown Al2O3/AlGaN/GaN MIS-HEMTs and HEMTs at 600°C in air
57Design and development of nanoimprint-enabled structures for molecular motor devices
58Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide
59Double nitridation of crystalline ZrO2/Al2O3 buffer gate stack with high capacitance, low leakage and improved thermal stability
60Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
61Effect of Deposition Method on Valence Band Offsets of SiO2 and Al2O3 on (Al0.14Ga0.86)2O3
62Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition
63Effect of hydrogen participation on the improvement in electrical characteristics of HfO2 gate dielectrics by post-deposition remote N2 , N2/H2, and NH3 plasma treatments
64Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
65Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
66Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
67Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
68Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems
69Effects of radiation and cryogenic temperatures on the electromechanical properties of materials used in microsystems
70Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
71Efficient Modification of Metal Oxide Surfaces with Phosphonic Acids by Spray Coating
72Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
73Engineering Interfacial Silicon Dioxide for Improved Metal-Insulator-Semiconductor Silicon Photoanode Water Splitting Performance
74Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays
75Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
76Enhancement of Electrical Characteristics and Reliability in Crystallized ZrO2 Gate Dielectrics Treated with In-Situ Atomic Layer Doping of Nitrogen
77Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
78Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
79Evaluating the Impact of Thermal Annealing on Al2O3/c-Si Interface Properties by Non-Destructive Measurements
80Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric
81Excellent surface passivation of crystalline silicon by ternary AlxMg1-xOy thin films
82Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes
83Fiber-matrix interface reinforcement using Atomic Layer Deposition
84Field-effect passivation of Si by ALD-Al2O3: Second harmonic generation monitoring and simulation
85Field-enhanced direct tunneling in ultrathin atomic-layer-deposition-grown Au-Al2O3-Cr metal-insulator-metal structures
86Fully CMOS-compatible titanium nitride nanoantennas
87GaN metal-insulator-semiconductor high-electron-mobility transistor with plasma enhanced atomic layer deposited AlN as gate dielectric and passivation
88Gate-tunable high mobility remote-doped InSb/In1-xAlxSb quantum well heterostructures
89Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
90Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
91Growth of V2O5 Films for Battery Applications by Pulsed Chemical Vapor Deposition
92High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition
93High breakdown voltage in AlN/GaN metal-insulator-semiconductor high-electron-mobility transistors
94Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
95Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition
96Hydrophilic/hydrophobic surface of Al2O3 thin films grown by thermal and plasma-enhanced atomic layer deposition on plasticized polyvinyl chloride (PVC)
97Impact of degradable nanowires on long-term brain tissue responses
98Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
99Impact of interface materials on side permeation in indirect encapsulation of organic electronics
100Impact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics
101Impact of Plasma-Assisted Atomic-Layer-Deposited Gate Dielectric on Graphene Transistors
102Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation
103Improvement in electrical characteristics of HfO2 gate dielectrics treated by remote NH3 plasma
104Improvement of Capacitance Equivalent Thickness, Leakage Current, and Interfacial State Density Based on Crystallized High-K Dielectrics/Nitrided Buffer Layer Gate Stacks
105Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
106Improving Thermal Stability and Interface State Density of High-k Stacks by Incorporating Hf into an Interfacial Layer on p-Germanium
107In situ x-ray photoelectron emission analysis of the thermal stability of atomic layer deposited WOx as hole-selective contacts for Si solar cells
108In0.53Ga0.47As FinFET and GAA-FET With Remote-Plasma Treatment
109Incorporating Yttrium into a GeO Interfacial Layer with HfO2-Based Gate Stack on Ge
110Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
111Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
112Influence of the polymeric substrate on the water permeation of alumina barrier films deposited by atomic layer deposition
113Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide
114Integration of microwave-annealed oxidation on germanium metal-oxide-semiconductor devices
115Interrogation of Electrochemical Properties of Polymer Electrolyte Thin Films with Interdigitated Electrodes
116Investigation of AlGaN/GaN HEMTs Passivated by AlN Films Grown by Atomic Layer Epitaxy
117Investigation of Atomic Layer Deposition Al2O3 Passivation for Screen-Printed Large-Area Solar Cells
118Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
119Investigation of ultra-thin titania films as hole-blocking contacts for organic photovoltaics
120Irradiation effects of graphene-enhanced gallium nitride (GaN) metal-semiconductor-metal (MSM) ultraviolet photodetectors
121Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
122Lithium-Iron (III) Fluoride Battery with Double Surface Protection
123Local Electronic Structures and Electrical Characteristics of Well-Controlled Nitrogen-Doped ZnO Thin Films Prepared by Remote Plasma In situ Atomic Layer Doping
124Localized dielectric breakdown and antireflection coating in metal-oxide-semiconductor photoelectrodes
125Long period gratings coated with hafnium oxide by plasma-enhanced atomic layer deposition for refractive index measurements
126Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al2O3 and Parylene C for Biomedical Implantable Devices
127Low sheet resistance titanium nitride films by low-temperature plasma-enhanced atomic layer deposition using design of experiments methodology
128Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
129Low-frequency dielectric properties of intrinsic and Al-doped rutile TiO2 thin films grown by the atomic layer deposition technique
130Low-Leakage Tetragonal ZrO2 (EOT < 1 nm) With In Situ Plasma Interfacial Passivation on Germanium
131Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
132Lytic enzymes as selectivity means for label-free, microfluidic and impedimetric detection of whole-cell bacteria using ALD-Al2O3 passivated microelectrodes
133Mechanical properties of thin-film Parylene-metal-Parylene devices
134Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition
135Molybdenum Disulfide Catalytic Coatings via Atomic Layer Deposition for Solar Hydrogen Production from Copper Gallium Diselenide Photocathodes
136Multiplexed actuation using ultra dielectrophoresis for proteomics applications: a comprehensive electrical and electrothermal design methodology
137Nanoshape Imprint Lithography for Fabrication of Nanowire Ultracapacitors
138Nanotextured surfaces for surface enhanced Raman spectroscopy and sensors
139Near room-temperature direct encapsulation of organic photovoltaics by plasma-based deposition techniques
140New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
141Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors
142Obtaining low resistivity (~100 µΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
143On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR
144Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
145Optical Properties of HfO2 Thin Films Grown by Atomic Layer Deposition
146P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
147Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
148Passivation effects of atomic-layer-deposited aluminum oxide
149Perspectives on future directions in III-N semiconductor research
150Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
151Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
152Plasma-assisted atomic layer deposition of Al2O3 and parylene C bi-layer encapsulation for chronic implantable electronics
153Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
154Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
155Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
156Plasma-enhanced atomic layer deposition of superconducting niobium nitride
157Plasma-enhanced atomic layer deposition of titanium vanadium nitride
158Plasma-enhanced atomic layer deposition of tungsten nitride
159Plasma-Enhanced Atomic Layer Deposition of Ultrathin Oxide Coatings for Stabilized Lithium-Sulfur Batteries
160Plasma-enhanced atomic layer deposition of vanadium nitride
161Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
162Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
163Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition
164Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
165Programmable on-chip DNA compartments as artificial cells
166Propagating gene expression fronts in a one-dimensional coupled system of artificial cells
167Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources
168Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
169Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
170Role of temperature on structure and electrical properties of titanium nitride films grown by low pressure plasma enhanced atomic layer deposition
171Room temperature atomic layer deposition of Al2O3 and replication of butterfly wings for photovoltaic application
172Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
173Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
174Self-aligned tip deinsulation of atomic layer deposited Al2O3 and parylene C coated Utah electrode array based neural interfaces
175Self-Limiting Growth of GaN at Low Temperatures
176Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
177Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
178Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
179Single-Cell Photonic Nanocavity Probes
180Smart Surface for Elution of Protein-Protein Bound Particles: Nanonewton Dielectrophoretic Forces Using Atomic Layer Deposited Oxides
181Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
182Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions
183Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase
184Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0.53Ga0.47As capacitors with and without an Al2O3 interface control layer
185Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks
186Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
187Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
188Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
189Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
190Supportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode
191Suppression of GeOx interfacial layer and enhancement of the electrical performance of the high-K gate stack by the atomic-layer-deposited AlN buffer layer on Ge metal-oxide-semiconductor devices
192Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure
193Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting
194Tailoring Electron-Transfer Barriers for Zinc Oxide/C60 Fullerene Interfaces
195TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
196Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
197The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO
198The effects of layering in ferroelectric Si-doped HfO2 thin films
199The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
200The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
201The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
202The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
203The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
204The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
205Thermal Stability of Novel Hole-Selective Contacts for Silicon Wafer Solar Cells
206Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry
207Top-down fabrication of fluorine-doped tin oxide nanopillar substrates for solar water splitting
208Tuning The Photoactivity of Zirconia Nanotubes-Based Photoanodes via Ultrathin Layers of ZrN: An Effective Approach toward Visible-Light Water Splitting
209Ultrathin Surface Coating Enables the Stable Sodium Metal Anode
210Ultraviolet Electroluminescence from Nitrogen-Doped ZnO-Based Heterojuntion Light-Emitting Diodes Prepared by Remote Plasma in situ Atomic Layer-Doping Technique
211Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
212Use of a passivation layer to improve thermal stability and quality of a phosphorene/AZO heterojunction diode
213Using top graphene layer as sacrificial protection during dielectric atomic layer deposition