Publication Information

Title:
Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
Type:
Journal
Info:
J. Am. Ceram. Soc., 1-7 (2012)
Date:
2012-11-09

Author Information

Name Institution
Çağla ÖzgitBilkent University
Fatma KayaciBilkent University
İnci DönmezBilkent University
Tamer UyarBilkent University
Necmi BiyikliBilkent University

Films

Plasma AlN


Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: HR-XPS, High Resolution X-ray Photoelectron Spectroscopy

Substrates

Nylon 6,6

Keywords

Sacrificial Template
Hollow Nanofibers

Notes

Ultratech Fiji PEALD AlN on nylon 6,6 sacrificial templates for hollow nanofiber synthesis.
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