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Publication Information

Title: Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition

Type: Journal

Info: J. Am. Ceram. Soc., 1-7 (2012)

Date: 2012-11-09

DOI: http://dx.doi.org/10.1111/jace.12030

Author Information

Name

Institution

Bilkent University

Bilkent University

Bilkent University

Bilkent University

Bilkent University

Films

Deposition Temperature = 200C

75-24-1

7664-41-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo Scientific K-Alpha

Bonding States

XPS, X-ray Photoelectron Spectroscopy

Thermo Scientific K-Alpha

Microstructure

TEM, Transmission Electron Microscope

FEI Tecnai G2 F30

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Electron Diffraction

FEI Tecnai G2 F30

Images

SEM, Scanning Electron Microscopy

FEI Quanta 200 FEG

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

FEI Quanta 200 FEG

Chemical Composition, Impurities

HR-XPS, High Resolution X-ray Photoelectron Spectroscopy

Unknown

Substrates

Nylon 6,6

Keywords

Sacrificial Template

Hollow Nanofibers

Notes

Ultratech Fiji PEALD AlN on nylon 6,6 sacrificial templates for hollow nanofiber synthesis.

155

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