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Çağla Özgit Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Çağla Özgit returned 31 record(s).

NumberTitle
1Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
2Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
3Self-Limiting Growth of GaN at Low Temperatures
4Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition
5Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
6Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
7The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
8The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
9Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
10Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
11Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition
12Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
13Atomic layer deposition of GaN at low temperatures
14Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
15Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
16Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes