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Çağla Özgit Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Çağla Özgit returned 31 record(s).

Number	Title
1	Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
2	Self-Limiting Growth of GaN at Low Temperatures
3	Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
4	Atomic layer deposition of GaN at low temperatures
5	Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
6	The influence of N₂/H₂ and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
7	Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
8	Effect of postdeposition annealing on the electrical properties of beta-Ga₂O₃ thin films grown on p-Si by plasma-enhanced atomic layer deposition
9	Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
10	Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
11	Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
12	The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
13	Preparation of Al₂O₃ and AlN Nanotubes by Atomic Layer Deposition
14	Low temperature deposition of Ga₂O₃ thin films using trimethylgallium and oxygen plasma
15	Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition
16	Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition