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Çağla Özgit Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Çağla Özgit returned 31 record(s).

Number	Title
1	Low temperature deposition of Ga₂O₃ thin films using trimethylgallium and oxygen plasma
2	The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
3	Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition
4	Atomic layer deposition of GaN at low temperatures
5	Self-Limiting Growth of GaN at Low Temperatures
6	Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
7	The influence of N₂/H₂ and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
8	Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
9	Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
10	Effect of postdeposition annealing on the electrical properties of beta-Ga₂O₃ thin films grown on p-Si by plasma-enhanced atomic layer deposition
11	Preparation of Al₂O₃ and AlN Nanotubes by Atomic Layer Deposition
12	Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
13	Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
14	Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
15	Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
16	Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures