Necmi Biyikli Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Necmi Biyikli returned 40 record(s).

Number	Title
1	Effect of postdeposition annealing on the electrical properties of beta-Ga₂O₃ thin films grown on p-Si by plasma-enhanced atomic layer deposition
2	Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
3	Self-Limiting Growth of GaN at Low Temperatures
4	Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
5	Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
6	Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition
7	The influence of N₂/H₂ and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
8	Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
9	Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
10	Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
11	Atomic layer deposition of GaN at low temperatures
12	Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
13	Preparation of Al₂O₃ and AlN Nanotubes by Atomic Layer Deposition
14	Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
15	Low temperature deposition of Ga₂O₃ thin films using trimethylgallium and oxygen plasma