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Necmi Biyikli Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Necmi Biyikli returned 40 record(s).

NumberTitle
1Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
2Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
3Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
4Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
5Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
6Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition
7Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
8Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
9Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
10Atomic layer deposition of GaN at low temperatures
11The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
12Self-Limiting Growth of GaN at Low Temperatures
13Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
14Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
15Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition