Inductively coupled plasma sources from Plasma ALD, LLC.


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Fatma Kayaci Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fatma Kayaci returned 6 record(s).

NumberTitle
1Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition
2Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition