Publication Information

Title:
Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition
Type:
Journal
Info:
MRS Proceedings, 1408, Mrsf11-1408-bb15-05. doi:10.1557/opl.2012.38
Date:
2012-01-11

Author Information

Name Institution
Çağla ÖzgitBilkent University
Fatma KayaciBilkent University
İnci DönmezBilkent University
Engin CagatayBilkent University
Tamer UyarBilkent University
Necmi BiyikliBilkent University

Films

Plasma AlN


Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction

Substrates

Nylon 6,6

Keywords

Notes

1370