Çağla Özgit Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Çağla Özgit returned 29 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
2	Atomic layer deposition of GaN at low temperatures
3	Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
4	Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition
5	Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
6	Electrical characteristics of β-Ga2O3 thin films grown by PEALD
7	Electronic and optical device applications of hollow cathode plasma assisted atomic layer deposition based GaN thin films
8	Fabrication of AlN/BN bishell hollow nanofibers by electrospinning and atomic layer deposition
9	Fabrication of flexible polymer-GaN core-shell nanofibers by the combination of electrospinning and hollow cathode plasma-assisted atomic layer deposition
10	Hollow cathode plasma-assisted atomic layer deposition of crystalline AlN, GaN and AlxGa1-xN thin films at low temperatures
11	Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
12	Low temperature thin film transistors with hollow cathode plasma-assisted atomic layer deposition based GaN channels
13	Low-Temperature Deposition of Hexagonal Boron Nitride Via Sequential Injection of Triethylboron and N2/H2 Plasma
14	Low-temperature grown wurtzite InxGa1-xN thin films via hollow cathode plasma-assisted atomic layer deposition
15	Low-temperature hollow cathode plasma-assisted atomic layer deposition of crystalline III-nitride thin films and nanostructures
16	Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
17	Low-temperature sequential pulsed chemical vapor deposition of ternary BxGa1-xN and BxIn1-xN thin film alloys
18	Metal-semiconductor-metal ultraviolet photodetectors based on gallium nitride grown by atomic layer deposition at low temperatures
19	Optical characteristics of nanocrystalline AlxGa1-xN thin films deposited by hollow cathode plasma-assisted atomic layer deposition
20	Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
21	Plasma-Enhanced Atomic Layer Deposition of III-Nitride Thin Films
22	Self-Limiting Growth of GaN at Low Temperatures
23	Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
24	Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
25	Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
26	Template-assisted synthesis of III-nitride and metal-oxide nano-heterostructures using low-temperature atomic layer deposition for energy, sensing, and catalysis applications (Presentation Recording)
27	Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
28	The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
29	The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition

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