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Çağla Özgit Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Çağla Özgit returned 31 record(s).

NumberTitle
1Self-Limiting Growth of GaN at Low Temperatures
2Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
3Atomic layer deposition of GaN at low temperatures
4Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
5Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
6Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
7The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
8The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
9Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
10Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
11Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
12Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition
13Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition
14Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
15Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
16Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition