Çağla Özgit Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Çağla Özgit returned 31 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
2Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
3Atomic layer deposition of GaN at low temperatures
4Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
5Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
6Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
7The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
8Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
9Self-Limiting Growth of GaN at Low Temperatures
10Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
11The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
12Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
13Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
14Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition
15Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition
16Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures